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Pentti Niiranen
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3
Using a heavy inert diffusion additive for superconformal atomic layer deposition
Today by
Arun Haridas Choolakkal
and
others
at
Linköping University
Physical Chemistry
,
Materials Science
Plasma Decomposition of Ferrocene
29 November 2024 by
Pentti Niiranen
and
others
at
Linköping University
Materials Chemistry
Plasma Decomposition of Ferrocene
10 October 2024 by
Pentti Niiranen
and
others
at
Linköping University
Materials Chemistry
Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition
5 September 2024 by
Arun Haridas Choolakkal
and
others
at
Linköping University
Physical Chemistry
,
Materials Science
Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition
20 June 2024 by
Arun Haridas Choolakkal
and
others
at
Linköping University
Physical Chemistry
,
Materials Science
Surface chemistry in atomic layer deposition of AlN thin films from Al(CH3)3 and NH3 studied by mass spectrometry
9 May 2024 by
Pamburayi Mpofu
and
others
at
Linköping University
Physical Chemistry
,
Inorganic Chemistry
Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition
24 January 2024 by
Arun Haridas Choolakkal
and
others
at
Linköping University
Physical Chemistry
,
Materials Science
Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons
25 August 2022 by
Pentti Niiranen
and
others
at
Linköping University
Materials Science
,
Analytical Chemistry
This is an AI-generated summary
Key points
Topics
Physical Chemistry
Surface
Materials Chemistry
Materials Science
Thin Films
Inorganic Chemistry
Kinetics and Mechanism
Physical and Chemical Processes
Materials Processing
Transport Phenomena
Analytical Chemistry
Analytical Apparatus
