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Semiconductor Epitaxy in Superconducting Templates

By M. Ritter and others
Integration of high quality semiconductor-superconductor devices into scalable and CMOS compatible architectures remains an outstanding challenge, currently hindering their practical implementation. Here, we demonstrate growth of InAs nanowires monolithically integrated on Si inside lateral cavities containing superconducting TiN elements. This technique allows growth of hybrid devices characterized by sharp semiconductor-superconductor... Show more
August 12, 2021
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Semiconductor Epitaxy in Superconducting Templates
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