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Nanoscale dynamics during self-organized ion beam patterning of Si: II. Kr+^+ Bombardment

By Peco Myint and others
Despite extensive study, fundamental understanding of self-organized patterning by broad-beam ion bombardment is still incomplete and controversial. Understanding the nanopatterning of elemental semiconductors, particularly silicon, is both foundational for the broader field and of intrinsic scientific and technological interest itself. This is the second component of a two-part investigation of... Show more
May 17, 2021
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Nanoscale dynamics during self-organized ion beam patterning of Si: II. Kr$^+$ Bombardment
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